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Determination of lithium ion diffusion in lithium–manganese-oxide-spinel thin films by secondary-ion mass spectrometry

✍ Scribed by Toyoki Okumura; Tomokazu Fukutsuka; Yoshiharu Uchimoto; Natsuko Sakai; Katsuhiko Yamaji; Harumi Yokokawa

Book ID
108192780
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
159 KB
Volume
189
Category
Article
ISSN
0378-7753

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Diffusion behavior of implanted Li ions
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✍ F. Salman; L. Chow; B. Chai; F.A. Stevie 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 210 KB

Lithium ions with dosages of 2.6 Â 10 12 , 2.6 Â 10 13 , 2.6 Â 10 14 , and 2.6 Â 10 15 cm À2 have been implanted into a GaN thin film grown on sapphire substrates. The diffusion behavior of these implanted Li ions in GaN thin film at different temperature anneals was studied using secondary ion mass