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Determination of limits in deposition of adhering a-C films on silicon produced by pulsed laser deposition

✍ Scribed by T. Zehnder; J. Balmer; W. Lüthy; H.P. Weber


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
547 KB
Volume
263
Category
Article
ISSN
0040-6090

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