✦ LIBER ✦
Determination of layer-thickness fluctuations in Mo/Si multilayers by cross-sectional HR-TEM and X-ray diffraction
✍ Scribed by A. Aschentrup; W. Hachmann; T. Westerwalbesloh; Y.C. Lim; U. Kleineberg; U. Heinzmann
- Publisher
- Springer
- Year
- 2003
- Tongue
- English
- Weight
- 289 KB
- Volume
- 77
- Category
- Article
- ISSN
- 1432-0630
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