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Determination of lattice mismatch in NiSi2overlayers on Si(111)

โœ Scribed by J. Zegenhagen; M. A. Kayed; K. -G. Huang; W. M. Gibson; J. C. Phillips; L. J. Schowalter; B. D. Hunt


Publisher
Springer
Year
1987
Tongue
English
Weight
456 KB
Volume
44
Category
Article
ISSN
1432-0630

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Epitaxial growth and lattice match of co
โœ J.-M. Gay; D. Mangelinck; P. Stocker; B. Pichaud; P. Gas ๐Ÿ“‚ Article ๐Ÿ“… 1996 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 425 KB

We report on an X-ray diffraction study of the epitaxial growth of thick films of cobalt and nickel disilicides on silicon. The lattice parameters both parallel and normal to the interface are measured at room temperature (RT) for various samples prepared by solid phase epitaxy or reactive depositio