✦ LIBER ✦
Determination of ion dose and profiles in74Ge and120Sn implanted silicon layers by PIXE, NAA, RBS and SIMS
✍ Scribed by B. Belin; P. Bode; R. Turan; Th. G. Van Meerten
- Book ID
- 111596351
- Publisher
- Springer
- Year
- 2004
- Tongue
- English
- Weight
- 364 KB
- Volume
- 261
- Category
- Article
- ISSN
- 1588-2780
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