✦ LIBER ✦
Determination of interface locations and layer thicknesses in SIMS and AES depth profiling of Si/Ti multilayer films by 50 at% definition
✍ Scribed by Hwang, Hye Hyun; Jang, Jong Shik; Kang, Hee Jae; Kim, Kyung Joong
- Book ID
- 121786551
- Publisher
- John Wiley and Sons
- Year
- 2014
- Tongue
- English
- Weight
- 841 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0142-2421
- DOI
- 10.1002/sia.5415
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