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Determination of implanted electrical profiles by a microwave contactless method: Application to selenium implantation in semi-insulating InP

✍ Scribed by M. Bellec; X. Le Cleac'h; P.N. Favennec; H. L'Haridon


Publisher
Elsevier Science
Year
1983
Weight
408 KB
Volume
209-210
Category
Article
ISSN
0167-5087

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