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Determination of Helium presence in the mask/wafer gap of X-ray lithography steppers

✍ Scribed by Juan R. Maldonado; Ron DellaGuardia; Edward Babich


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
223 KB
Volume
27
Category
Article
ISSN
0167-9317

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In aqueous solution, bis(nucleoside) complexes formed by the reaction of cis-[Pt(NH3)2(H2O)2]2+ with an excess of either adenosine (ado) or a mixture of adenosine and guanosine (guo) undergo a slow N7--> N1 linkage isomerisation in the adenine moiety. The isomerisation probably involves the breaking