Determination of heat and ion fluxes in plasma immersion ion implantation by in situ measurement of temperature using laser interferometry

✍ Scribed by K Takaki; D Koseki; T Fujiwara

• Book ID: 108422822
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 147 KB
• Volume: 136
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/s0257-8972(00)01027-6