Determination of existing stress in silicon films on sapphire substrate using raman spectroscopy: Th. Englert, G. Abstreiter and J. Pontcharra. Solid-St. Electron., 23, 31 (1980)

• Publisher: Elsevier Science
• Year: 1980
• Tongue: English
• Weight: 123 KB
• Volume: 20
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(80)90734-9