Determination of Layer Thicknesses by To
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Horst Ebel; Robert Svagera; Michael Mantler; Maria F. Ebel
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Article
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1997
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John Wiley and Sons
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English
⚖ 831 KB
The application of total electron yield (TEY) measurements to the determination of layer thicknesses is described, presenting an introduction to the principles of TEY measurements, the instrumentation and the evaluation of measured signals. The formulation of the theoretical correlation between meas