Determination of doping profiles for low boron ion implantations in silicon : R. Kinder and H. Frank. Solid-St. Electron.31, 265 (1988)

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 127 KB
• Volume: 29
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(89)90488-5