Determination of dielectric constants of substrates and thin films using angular dependent IR reflection spectra

✍ Scribed by H. Hobert; H. Dunken; G. Peiter

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 249 KB
• Volume: 349
• Category: Article
• ISSN: 0022-2860
• DOI: 10.1016/0022-2860(95)08769-r