Determination of depth resolution parameters from AES sputtering profiles of multilayer structures with varying single layer thicknesses

✍ Scribed by A. Zalar; S. Hofmann

• Publisher: John Wiley and Sons
• Year: 1990
• Tongue: English
• Weight: 251 KB
• Volume: 16
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/sia.740160171