✦ LIBER ✦
Determination of deep ultrathin equivalent oxide thickness (EOT) from measuring flat-band C-V curve
✍ Scribed by Chen, C.H.; Fang, Y.K.; Yang, C.W.; Ting, S.F.; Tsair, Y.S.; Wang, M.F.; Yao, L.G.; Chen, S.C.; Yu, C.H.; Liang, M.S.
- Book ID
- 114539055
- Publisher
- IEEE
- Year
- 2002
- Tongue
- English
- Weight
- 336 KB
- Volume
- 49
- Category
- Article
- ISSN
- 0018-9383
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