✦ LIBER ✦
Determination of boron concentration in heavily doped p-type Si1−xGex/Si heterostructure by infrared ellipsometric spectroscopy
✍ Scribed by Changchun Chen; Jiangfeng Liu; Benhai Yu; Qirun Dai
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 580 KB
- Volume
- 38
- Category
- Article
- ISSN
- 0026-2692
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