✦ LIBER ✦
Detection of residual impurities after the alkali metal enhanced oxidation of Si(100) surfaces by SIMS and Hall effect measurements
✍ Scribed by G. Pirug; O. Müller; H.P. Bonzel
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 373 KB
- Volume
- 70-71
- Category
- Article
- ISSN
- 0169-4332
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