✦ LIBER ✦
Detection of oxidation stacking faults in silicon wafers by a multipass Fabry-Perot Rayleigh-Brillouin scattering spectrometer
✍ Scribed by S.C. Ng; Lu Taijing
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 214 KB
- Volume
- 131
- Category
- Article
- ISSN
- 0022-0248
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