✦ LIBER ✦
Detection of amorphous-silicon residue generated in thin-film transistor manufacturing process using a high spectral response of amorphous-silicon layer on green light source
✍ Scribed by Jeong Seok Son; Jong Ho Lee; Seung Hee Lee
- Book ID
- 108078940
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 529 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1567-1739
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