✦ LIBER ✦
Detection and characterization of microdefects and microprecipitates in Si wafers by Brewster angle illumination using an optical fiber system
✍ Scribed by Lu Taijing; Koichi Toyoda; Nobuhito Nango; Tomoya Ogawa
- Book ID
- 107790794
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 937 KB
- Volume
- 114
- Category
- Article
- ISSN
- 0022-0248
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