Detailed study about influence of oxygen on trap properties in SiOxNy by the thermally stimulated current and maximum entropy method

✍ Scribed by Yoshiki Yonamoto; Yutaka Inaba; Naotoshi Akamatsu

• Book ID: 113916049
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 364 KB
• Volume: 64
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/j.sse.2011.06.047