✦ LIBER ✦
Detailed Analysis and Precise Modeling of Multiple-Energy Al Implantations Through Layers Into 4H-SiC
✍ Scribed by Mochizuki, K.; Someya, T.; Takahama, T.; Onose, H.; Yokoyama, N.
- Book ID
- 114619475
- Publisher
- IEEE
- Year
- 2008
- Tongue
- English
- Weight
- 415 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0018-9383
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