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Destruction of Pharmaceutical and Biopharmaceutical Wastes by the Modar Supercritical Water Oxidation Process

✍ Scribed by Johnston, James B. ;Hannah, Robert E. ;Cunningham, Virginia L. ;Daggy, Bruce P. ;Sturm, Frank J. ;Kelly, Robert M.


Book ID
109909747
Publisher
Nature Publishing Group
Year
1988
Tongue
English
Weight
734 KB
Volume
6
Category
Article
ISSN
1087-0156

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HF and water delivered using liquid, gas, and supercritical CO 2 phases were used to remove native oxides and suboxides from SiGe surfaces containing 15-30% Ge. X-ray photoelectron spectroscopy was used to monitor the Si 2p and Ge 2p 3/2 peaks as a function of the process type, HF concentration, and