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Desorption study of a proton from H/Si(100) by electron stimulated desorption spectroscopy

โœ Scribed by Kazuyuki Ueda; Sinji Kodama; Akemi Takano

Publisher
Elsevier Science
Year
1993
Weight
67 KB
Volume
283
Category
Article
ISSN
0167-2584

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โœ Aguilera, A. F.; Campbell, J. H.; Craig, J. H.; Pannell, K. H. ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 274 KB ๐Ÿ‘ 1 views

We have studied digermane-covered Si(100) using electron-stimulated desorption (ESD). Estimates are presented for the total H(a) ESD removal cross-section for digermane-exposed Si(100) substrates at 85 K using electrons incident at 150 eV energy. It is found that electron-enhanced deposition of Ge o