Design software for SiGe

• Book ID: 104366765
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 137 KB
• Volume: 16
• Category: Article
• ISSN: 0961-1290
• DOI: 10.1016/s0961-1290(03)80498-2

✦ Synopsis

Coupled Shower-head (CCS) MOCVD reactor. The reactor, which can be configured for 3x2" GaN on sapphire and 1x4" GaN on silicon, will be used to develop short-wavelength laser diodes and UV photo-detector based devices.