Design Principles for an Illumination System Using an Excimer Laser as a Light Source: J. Wangler, J. Liegel, M. J. Lacombat, S. Wittekoek, SPIE, Optical microlithography and metrology for microcircuit fabrication, Vol 1138, Paris (France), 24–28 Apr 1989, pp. 129–136. Society of Photo-Optical Instrumentation Engineers. Bellingham, WA (USA)

• Book ID: 107889049
• Publisher: Elsevier Science
• Year: 1991
• Tongue: English
• Weight: 273 KB
• Volume: 13
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(91)90535-q