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Design of the point spread function of a lens, binary phase filter combination and its application to photolithography

✍ Scribed by H.Y. Chen; N. Mayhew; E.G.S. Paige; G.G. Yang

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
828 KB
Volume
119
Category
Article
ISSN
0030-4018

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