Design of practical deflection field in nanometer-scale focused ion beam system

✍ Scribed by Wen-Ping Li; Li Han; Wen-Qi Gu

• Book ID: 108223237
• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 695 KB
• Volume: 579
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2007.06.012