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Design of Nanosprings Using Si/SiGe Bilayer Thin Film

✍ Scribed by Kim, Seongseop; Kim, Wonbae; Cho, Maenghyo

Book ID
120018750
Publisher
Institute of Pure and Applied Physics
Year
2011
Tongue
English
Weight
538 KB
Volume
50
Category
Article
ISSN
0021-4922

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## Abstract Epitaxial siliconβ€”germanium (SiGe) thin films are being developed for a number of interesting applications. Potential uses include applications as fabrication layers for heterojunction bipolar transistor devices and a number of other novel electronic devices. For device applications, Si