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Design of high precision linear stage with double-sided multi-segmented trapezoidal magnet array and its compensations for force ripples

✍ Scribed by Moon G. Lee; Young-Man Choi; Sung Q. Lee; Dae-cheol Lim; Dae-Gab Gweon


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
918 KB
Volume
16
Category
Article
ISSN
0957-4158

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