✦ LIBER ✦
Design of a tri-layer bottom anti-reflective coating for KrF, ArF and F2 lithographies
✍ Scribed by W.C. Cheng; F.D. Lai; H.M. Huang; Lon A. Wang
- Book ID
- 108207337
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 188 KB
- Volume
- 73-74
- Category
- Article
- ISSN
- 0167-9317
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