Design of a system for deposition of compound thin films by evaporation from separate sources : D. R. Frankl, A. Hagenlocher, E. D. Haffner, P. H. Keck and A. Sandor. Proc. 1962 Electronic Components Conference, Washington D.C., p. 44 (May 1962)

• Book ID: 113189683
• Publisher: Elsevier Science
• Year: 1963
• Tongue: English
• Weight: 93 KB
• Volume: 2
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(63)90380-9