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Design of a Reflective Aspherical Surface of a Compact Beam-Shaping Device

โœ Scribed by Toshimitsu Takaoka; Naoki Kawano; Yasuhiro Awatsuji; Toshihiro Kubota


Publisher
Optical Society of Japan
Year
2006
Tongue
English
Weight
709 KB
Volume
13
Category
Article
ISSN
1340-6000

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๐Ÿ“œ SIMILAR VOLUMES


Design for e-beam testability โ€” A demand
โœ K.D. Herrmann; E. Kubalek ๐Ÿ“‚ Article ๐Ÿ“… 1987 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 883 KB

Based on the trends in development of integrated circuits {IC) until the year 2000 it is shown that, presuming the present capability of electron beam test systems, in future an electron beam test {EBT) will not be practicable anymore. This is mainly due to long measurement times, large measurement