Design of a real-time spectroscopic rotating compensator ellipsometer without systematic errors

✍ Scribed by Broch, Laurent; Stein, Nicolas; Zimmer, Alexandre; Battie, Yann; Naciri, Aotmane En

• Book ID: 122125742
• Publisher: Elsevier Science
• Year: 2014
• Tongue: English
• Weight: 820 KB
• Volume: 571
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2013.11.138