Micro-and nanoelectromechanical systems (MEMS/NEMS) have a high potential for mass sensing application. By miniaturization of the dimensions, higher and higher sensitivities can be achieved. Here we are presenting finite element modelling and optimization of a free-free beam type mechanical resonato
β¦ LIBER β¦
Design of a novel MEMS platform for the biaxial stimulation of living cells
β Scribed by N. Scuor; P. Gallina; H. V. Panchawagh; R. L. Mahajan; O. Sbaizero; V. Sergo
- Publisher
- Springer
- Year
- 2006
- Tongue
- English
- Weight
- 445 KB
- Volume
- 8
- Category
- Article
- ISSN
- 1387-2176
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