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Design of a high-resolution microfluidic microwave MEMS phase shifter

✍ Scribed by Burak Ozbey; Sule Ozturk; Ozgur Aktas

Publisher: John Wiley and Sons
Year: 2011
Tongue: English
Weight: 579 KB
Volume: 53
Category: Article
ISSN: 0895-2477
DOI: 10.1002/mop.26127

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✦ Synopsis

Abstract

In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated.The design principles, the fabrication process, and experimental results (S‐parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high‐power handling capacity, and a high‐resolution along with a small settling time. © 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett, 2011; View this article online at wileyonlinelibrary.com. DOI 10.1002/mop.26127

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