Design of single flux quantum cells for
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H. Akaike; M. Tanaka; K. Takagi; I. Kataeva; R. Kasagi; A. Fujimaki; K. Takagi;
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Article
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2009
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Elsevier Science
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English
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We present design of single flux quantum (SFQ) cells for a 10-Nb-layer process which has been developed to fabricate SFQ VLSI circuits. The device fabricated by the process has a structure of an active layer on the top, two passive transmission line (PTL) layers in the middle, and a DC power (DCP) l