✦ LIBER ✦
Design of a control system for a macro-micro dual-drive high acceleration high precision positioning stage for IC packaging
✍ Scribed by YanJie Liu; Teng Li; LiNing Sun
- Book ID
- 107356418
- Publisher
- SP Science China Press
- Year
- 2009
- Tongue
- English
- Weight
- 602 KB
- Volume
- 52
- Category
- Article
- ISSN
- 1006-9321
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