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Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning

✍ Scribed by Yuen Kuan Yong; S. Aphale; S. Reza Moheimani

Book ID: 126716569
Publisher: IEEE
Year: 2009
Tongue: English
Weight: 771 KB
Volume: 8
Category: Article
ISSN: 1536-125X
DOI: 10.1109/TNANO.2008.2005829

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