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Design for manufacture of micromachined fabry—pérot cavity-based sensors

✍ Scribed by Youngmin Kim; Dean P. Neikirk

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 470 KB
Volume: 50
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(96)80098-7

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