Design for Manufacturability and Statistical Design: A Constructive Approach (Integrated Circuits and Systems)

✍ Scribed by Michael Orshansky, Sani Nassif, Duane Boning

• Publisher: Springer
• Year: 2007
• Tongue: English
• Leaves: 320
• Edition: 1
• Category: Library

✦ Synopsis

Design for Manufacturability and Statistical Design: A Comprehensive Approach presents a comprehensive overview of methods that need to be mastered in understanding state-of-the-art design for manufacturability and statistical design methodologies. Broadly, design for manufacturability is a set of techniques that attempt to fix the systematic sources of variability, such as those due to photolithography and CMP. Statistical design, on the other hand, deals with the random sources of variability. Both paradigms operate within a common framework, and their joint comprehensive treatment is one of the objectives of this book and an important differentation.

✦ Table of Contents

cover......Page 1
Preface......Page 6
Contents......Page 9
1 INTRODUCTION......Page 13
2 FRONT END VARIABILITY......Page 21
3 BACK END VARIABILITY......Page 53
4 ENVIRONM ENTAL VARIABILITY......Page 69
5 TEST STRUCTURES FOR VARIABILITY......Page 93
6 STATISTICAL FOUNDATIONS OF DATA ANALYSIS AND MODELING......Page 109
7 LITHOGRAPHY ENHANCEM ENT TECHNIQUES......Page 133
8 ENSURING INTERCONNECT PLANARITY......Page 161
9 STATISTICAL CIRCUIT ANALYSIS......Page 171
10 STATISTICAL STATIC TIM ING ANALYSIS......Page 205
11 LEAKAGE VARIABILITY AND JOINT PARAMETRIC YIELD......Page 243
12 PARAM ETRIC YIELD OPTIMIZATION......Page 255
13 CONCLUSIONS......Page 283
APPENDIX: PROJECTING VARIABILITY......Page 285
References......Page 294
Index......Page 312