✦ LIBER ✦
Design considerations of rectangular electrostatic torsion actuators based on new analytical pull-in expressions
✍ Scribed by Degani, O.; Nemirovsky, Y.
- Book ID
- 120030169
- Publisher
- IEEE
- Year
- 2002
- Tongue
- English
- Weight
- 192 KB
- Volume
- 11
- Category
- Article
- ISSN
- 1057-7157
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