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Design considerations for a silicon capacitive tactile cell

โœ Scribed by M.R. Wolffenbuttel; P.P.L. Regtien

Book ID
108028004
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
374 KB
Volume
24
Category
Article
ISSN
0924-4247

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This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over th