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Design consideration and performance of a new MOS imaging device

✍ Scribed by Ando, H.; Ohba, S.; Nakai, M.; Ozaki, T.; Ozawa, N.; Ikeda, K.; Masuhara, T.; Imaide, T.; Takemoto, I.; Suzuki, T.; Fujita, T.

Book ID
114595233
Publisher
IEEE
Year
1985
Tongue
English
Weight
675 KB
Volume
32
Category
Article
ISSN
0018-9383

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## Abstract This letter presents a novel MEMS‐based multifunction‐integrated optical device capable of performing as variable optical power splitter (VOPS), optical switch (OS), and variable optical attenuator (VOA). The device manipulates the light with a binary‐slope mirror driven by compound ele