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Design and performance of two-channel EUV multilayer mirrors with enhanced spectral selectivity

✍ Scribed by Christophe Hecquet; Franck Delmotte; Marie-Françoise Ravet-Krill; Sébastien de Rossi; Arnaud Jérome; Françoise Bridou; Françoise Varnière; Evgueni Meltchakov; Frédéric Auchère; Angelo Giglia; Nicola Mahne; Stefano Nanaronne


Book ID
106021545
Publisher
Springer
Year
2009
Tongue
English
Weight
598 KB
Volume
95
Category
Article
ISSN
1432-0630

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