A compact stainless-steel ultra-high vacuum system is designed, constructed and tested which enables any vacuum gauge to be calibrated absolutely, quickly and reliably over the pressure range 10 torr to 10 -8 torr. Experiments confirm that such gauge calibration can be carried out accurately without
β¦ LIBER β¦
Design and performance of an immersable low-temperature pressure gauge
β Scribed by M. Barucci; E. Gottardi; I. Peroni; G. Ventura
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 159 KB
- Volume
- 40
- Category
- Article
- ISSN
- 0011-2275
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β¦ Synopsis
A sensitive diaphragm-type pressure transducer, suitable for use at low temperature is described. This device was optimized for pressure up to 3.5 MPa. The external pressure deΒ―ects two CuBe disks, which form the electrodes of a capacitor. The transducer sensitivity at 3.43 MPa is about 25 pF/MPa. No hysteresis was detected within the accuracy of the piezoelectric pressure transducer used in the calibration procedure.
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