Design and Manufacturing of Active Microsystems
Preface
Contents
Chapter 1 Introduction
1.1 Initial Situation
1.2 Prototype Concepts for Active Microsystems
1.3 Scientific Development
1.4 Outline
Part I Design and Construction
Chapter 2 Electromagnetic Design of Microactuators
Abstract
2.1 Forms of Electromagnetic Microactuators
2.2 Design and Construction
2.3 Material Properties
2.4 Coil Forms
2.5 Functional Principles
2.5.1 Variable Reluctance (VR) Principle
2.5.2 PM Synchronous Principle
2.5.3 Hybrid Principle
2.5.4 Bearing and Guidance Concepts
2.6 Design of Micromotors
2.6.1 Linear Synchronous Micromotors
2.6.2 Synchronous Micromotor with Radial Flux
2.6.3 Synchronous Micromotor with Axial Flux
2.6.4 Linear VR Step Micromotors
2.6.5 Modular Linear VR Step Micromotor
2.6.6 Linear VR Step Micromotor with Integrated Magnetic Guidance
2.6.7 Rotating VR Step Micromotors
Acknowledgements
References
Chapter 3 Drive Systems Based on Electromagnetic Microactuators
Abstract
3.1 Configuration of Drive Systems Based on Electromagnetic Microactuators
3.2 Power Supply
3.2.1 Electrical Parameters of the Linear Microactuators
3.2.2 Linear Series Regulator
3.2.3 Switching DC-DC Converter – Inductive
3.2.4 Switched Capacitor DC-DC Converter
3.3 Current Command Generation
3.3.1 Permanent Magnet Synchronous Motor
3.3.2 Variable Reluctance Step Motor
3.4 Position Control
3.4.1 Principle of Sliding Mode Control
3.4.2 Modified Sliding Mode Control
Acknowledgements
References
Chapter 4 Modular Computer Aided Design Environment for Active Microsystems
Abstract
4.1 Introduction
4.2 Phase of Preliminary Design
4.2.1 Intraweb Knowledge Storage Service
4.2.2 Interactive Design of Multi-Dimensional Function Structures
4.2.3 Evaluation of Morpholgies
4.2.4 Web-based Design Catalogue System
4.2.5 Optimization of Microcoils
4.2.6 Building Blocks for Active Microsystems
4.3 3D-Model Synthesis and Optimization
4.3.1 Linking CAD and FEA Models for Optimization
4.3.2 Tolerance Analysis and Synthesis in MEMS-Design
4.3.3 Rule Based Verification of Assembly
4.4 Synthesis and Optimization of Processes and Process Sequences
4.4.1 Rule Based Validation of Processing Sequences
4.4.2 Simulation of the Silicon Wet-Etching Process
4.4.3 Simulation of Diffraction Effects During UV Depth Lithography
4.4.4 Optimization of Lithographic Masks
4.4.5 Conclusion and Outlook
4.4 Synthesis and Optimization of Processes and Process Sequences
4.4.1 Rule Based Validation of Processing Sequences
4.4.2 Simulation of the Silicon Wet-Etching Process
4.4.3 Simulation of Diffraction Effects During UV Depth Lithography
4.4.4 Optimization of Lithographic Masks
4.4.5 Conclusion and Outlook
Acknowledgements
References
Part II Guiding and Measuring in Active Microsystems
Chapter 5 Wear Behavior in Microactuator Interfaces
Abstract
5.1 Introduction
5.2 Test Systems
5.2.1 Nanoindentation and Scratch Test
5.2.2 Tape Abrasive Wear Test
5.2.3 Rotational Test System
5.2.4 Oscillating Test
5.3 Fabrication Process of Tribological Surfaces
5.3.1 Physical Vapor Deposition (PVD)
5.3.2 Plasma Enhanced Chemical Vapor Deposition (PECVD)
5.3.3 Hybrid Processes (PVD + PECVD)
5.4 Experimental Investigations
5.4.1 Investigations with AFM Based Methods
5.4.2 Tape Abrasive Wear Tests
5.4.3 Rotational Tests
5.4.4 Oscillating Tests
5.5 Conclusion
Acknowledgements
References
Chapter 6 Friction Behavior in Microsystems
Abstract
6.1 Introduction
6.2 Preparation of Microguides and Bearings
6.2.1 Vacuum Coating
6.2.2 Tribological Microguide
Sliding Guide
Ball Bearings
6.3 Characterization
6.3.1 Microfriction under Single Asperity Contact
6.3.2 Oscillating Friction Tester
6.3.3 Flat-Flat-Contact Friction Force Measuring System
6.4 Results
6.4.1 Microfriction
Models for Microfriction
Friction Reduction by Different Coating Systems
Load Dependence for Microcontacts
Influence of the Resulting Contact Area
Stick-Slip and Adhesion Phenomena
6.4.2 Friction of Microguides
Microguide
Friction of Ball Bearings
Friction of Integrated Guides of Microsystems
Tribological Properties of Rotary Actuators
6.5 Conclusion
Acknowledgements
References
Chapter 7 Active Linear Guiding Concepts for Microsystems
Abstract
7.1 Introduction
7.2 Active Aerostatic Guides for Microsystems
7.2.1 Requirements
7.2.2 Design and Properties of Aerostatic Microbearings
7.2.3 Construction and Alignment
7.3 Active Magnetic Guides for Microsystems
7.3.1 Requirements and Design
7.3.2 Prototypical Magnetic Guide
7.4 Capacitive Displacement Sensors for Active Guides
7.4.1 Design
7.4.2 Calibration
7.5 Conclusion
Acknowledgements
References
Chapter 8 Design of Sensors for Position Control of Microactuators
Abstract
8.1 Introduction, Requirements and Measurement Principle
8.2 Simulation of Integrated Laser Beam 3×3 Couplers
8.2.1 Requirements
8.2.2 Simulations
8.3 Production of Integrated 3×3 Couplers in Glass
8.3.1 Manufacturing Methods
8.3.2 Produced Couplers
8.4 Beam Guiding by Refractive and Diffractive Elements: Grating, Prism, Lenses
8.4.1 Grating as Beam Separation for Interference
8.4.2 Integration and Qualification of a 90◦ Prism
8.4.3 Beam Guiding Lens
8.5 Signal Detection
8.5.1 Photo Detectors
8.5.2 Positioning and Fixing
8.6 Realtime Signal Processing
8.6.1 Reference Fibre Coupler Setup
8.6.2 LabVIEW Algorithm for FPGA
8.6.3 FPGA DSP Results
8.7 Alignment and Fixing of Optical Components
8.7.1 Optical Elements and Blocks to Align
8.7.2 Alignment and Fixation
8.7.3 Adaptation to 1D and 2D Micromotor
8.8 Summary
Acknowledgements
References
Chapter 9 Tactile Dimensional Micrometrology
Abstract
9.1 Introduction
9.2 3D Microprobes
9.2.1 Working Principle of the Piezoresistive 3D Microprobe
9.2.2 Optimized Fabrication Process
9.2.3 Metrological Properties
Sensitivity Calibration
Probing Repeatability
3D Measurement
9.2.4 Optimized Membrane Designs
9.2.5 Application of the 3D Microprobe for Elasticity and Hardness Measurements
9.3 Calibration of Probing Forces
9.3.1 Compensation Balance Based Micro Force Measurement
9.3.2 Micro Force Transfer Standard for Probing Forces
9.4 Dimensional Standards for Micro Metrology
9.4.1 3D Silicon Artefact with Enhanced Groove Topography
9.4.2 3D Hybrid Artefact
Acknowledgements
References
Part III Manufacturing and Fabrication
Chapter 10 Fabrication of Magnetic Layers for Electromagnetic Microactuators
Abstract
10.1 Introduction
10.1.1 Soft Magnetic Thin-films
10.1.2 Hard Magnetic Thin films
10.2 Fabrication Technologies
10.3 Test Systems
10.3.1 Magnetic Properties Analysis
10.3.2 Composition and Structure Analysis
10.3.3 Methods for Residual Stress Determination
10.4 Experimental Investigations on Soft Magnetic Materials
10.4.1 Electroplated Soft Magnetic Materials
10.4.2 PVD Deposited Soft Magnetic Thin-films
10.4.3 Polymer Embedded Soft Magnetic Materials
10.5 Experimental Investigation on Hard Magnetic Materials
10.5.1 SmCo Deposited by PVD
10.5.2 Gas-flow Sputter Deposited SmCo
10.5.3 Electroplated Hard Magnetic Materials
10.5.4 Polymer Embedded Hard Magnetic Materials
10.6 System Integration Aspects
10.7 Conclusion
Acknowledgements
References
Chapter 11 Fabrication of Excitation Coils for Electromagnetic Microactuators
11.1 Introduction
11.2 Photoresist Pattern Creation
11.3 Electroplating of Cu Microcoils
11.4 Insulation
11.5 Integration of Coils into Microactuators
11.5.1 Planar Meander Coil
11.5.2 Planar Spiral Coils
Double-layer Spiral Coil
Four-layer Spiral Coil
Technology Study for a Spiral Coil with a Submicrometer Conductor Width
11.5.3 Vertical Meander Coil
11.5.4 Helical Coil
11.6 Conclusion
Acknowledgements
References
Chapter 12 Development and Fabrication of Electromagnetic Microactuators
Abstract
12.1 Introduction
12.2 Linear VR Stepper Motor
12.2.1 The First Generation
12.2.2 The Second Generation
12.2.3 Characterization
12.3 Rotating VR Stepper Motor
12.3.1 Fabrication
12.3.2 Characterization
12.4 Rotating Synchronous Micro Motors
12.4.1 Polymer Magnets
12.4.2 Fabrication
12.4.3 Characterization
12.5 Conclusion and Outlook
Acknowledgements
References
Chapter 13 Development and Fabrication of Linear and Multi-Axis Microactuators
Abstract
13.1 Introduction
13.2 Linear VR Microstep Motor
13.3 Linear Hybrid Microstep Motor
13.4 Linear Synchronous Micromotor
13.5 xy-Actuator Investigations
13.5.1 xy-Actuator Concept and Prototype
13.5.2 Investigations on Magnetic Levitation
13.6 VR Micro- and Nanopositionier for xy-Actuators
13.6.1 Approach
13.6.2 Actuator Geometry
13.6.3 Stator Fabrication
13.6.4 Traveler Fabrication
13.6.5 System Integration
13.7 Experimental
13.7.1 Driving force measurement
13.7.2 Levitation test
13.7.3 xy-nanopositioning system
13.8 Conclusion
Acknowledgements
References
Chapter 14 Micromachining of Parts for Microsystems
Abstract
14.1 Introduction
14.2 Microgrinding
14.2.1 Workpiece Surface and Geometry Quality in Microgrinding
14.2.2 CVD-Coated Grinding Wheels
Tool Development and Specifications of CVD-Coated Grinding Wheels
Grinding with CVD-Coated Grinding Wheels
14.2.3 Multi-Layered Metal Bonded Diamond Grinding Wheels
Grinding with Multiple Microprofiled Grinding Wheels
Grinding with Undercut Profiles
14.3 Microgrinding of Boreholes
14.3.1 Development of Microgrinding Pins
14.3.2 Microgrinding with the Developed Tools
14.3.3 Ultrasonic-Assisted Holegrinding with Profiled Tools
14.4 Conclusions
Acknowledgements
References
Part IV Microassembly
Chapter 15 Size-Adapted Manipulation Robots for Microassembly
Abstract
15.1 Introduction
Kinematic Considerations of Robot Structures
Kinematic Synthesis and Sensitivity Analysis
Performance Calculations and Terminology
15.2 Size-Adapted Robot for Microassembly
15.2.1 Robot Creation and Performance
15.2.2 Additional Sensors and their Integration
15.2.3 Assembly Uncertainty
15.3 Miniaturized Robot for Desktop Factories
15.3.1 Concept of the Robot Structure
15.3.2 Functional Model of a Desktop Factory Robot
15.3.3 Analyses of the Robot Structure
15.4 Conclusion
Acknowledgements
References
Chapter 16 Tools for Handling and Assembling of Microparts
Abstract
16.1 Introduction
16.2 Electrostatic Forces in Microhandling Processes
16.2.1 Centering Electrostatic Microgripper
Test Rig for Electrostatic Force Measurement
Experimental Results with Centering Electrostatic Microgrippers
Handling Tests with Centering Electrostatic Microgrippers
16.2.2 Handling Devices Generating Electrostatic Forces Without Electrodes
Experimental Results by Modifying Surface Charges
16.2.3 Improvement of Process Reliability by Active Neutralization of Mechanical Microgrippers
16.3 Mechanical Microgrippers with Integrated Actuators
16.3.1 Basic Design of the Mechanical Microgrippers
16.3.2 Microgrippers with SMA Actuators
16.3.3 Microgrippers with Pneumatic Actuators
16.3.4 Microgrippers with Thermal Expansion Actuators
16.3.5 Gripper Construction Kit
16.4 Pneumatically Driven Auxiliary Microtools
16.4.1 Centrifugal Feeder
16.4.2 Active Clamping Device
Acknowledgements
References
Chapter 17 Stereophotogrammetry in Microassembly
Abstract
17.1 Introduction
17.2 Photogrammetry
17.2.1 Sensor Specification
17.2.2 Imaging System
17.2.3 Illumination
17.2.4 Signalization
Signalization by Polygons
Signalization by Scattering Circular Marks
Signalization by Fluorescent Features
17.2.5 Evaluation
Camera Model
Calibration
Epipolar Association
Determination of Part Location
17.2.6 Integration
17.3 Conclusions
Acknowledgements
References
Chapter 18 Use of Hot Melt Adhesives for the Assembly of Microsystems
Abstract
18.1 Adhesive Bonding as Micro Joining Technology
18.2 Properties of Hot Melt Adhesives
18.3 Adhesive System Selection Criteria
18.3.1 Hot Melt Adhesives
18.3.2 Adhesive Systems with Enhanced Thermal Stability
18.4 Different Particle Shapes of Micro-Scale Hot Melt Adhesives
18.5 Application Methods for Micro-Scale Hot Melt Adhesives
18.6 Properties of Hot Melt Adhesive Bonds
18.7 Conclusion
Acknowledgements
References
Chapter 19 Design of a Microassembly Process Based on Hot Melt Adhesives
Abstract
19.1 Introduction
19.1.1 Variables Influencing the Assembly Process
19.1.2 Assembly Strategies
19.1.3 Joining Technologies
19.2 Process Design for the Joining with Hot Melt Adhesives
19.2.1 Tasks of a Heat Management
Heat Introduction
Heat Dissipation
Gripper
Implementation
19.2.2 Heat Management
Passive Heat Management
Active Heat Management
19.3 Implementation of a Passive Heat Managment
19.3.1 Design of Passive Heat Management
Process Design
Thermal Design
Gripper Design
19.3.2 Simulation of Assembly Processes
19.4 Implementation of Active Heat Managment
19.4.1 Design of Active Heat Management
Process Design
Thermal Design
Gripper Design
19.4.2 Implementation and Experiments
19.5 Conclusion
Acknowledgements
References
Chapter 20 Design of an Automated Assembly for Micro and Nano Actuators
Abstract
20.1 Introduction
20.1.1 Motivation
20.1.2 Components of the Microstep Motors
20.2 Assembly Concept for a Linear Microactuator with Levitation System
20.3 Assembly Concept for a xy-Micro- and Nanopositioner
20.4 Conclusion
Acknowledgements
Part V Industrial Applications
Chapter 21 Bistable Microvalve for Biomedical Usage
Abstract
21.1 Introduction
21.1.1 Implantable Infusion Pump and Requirements for the Valve
21.1.2 State of the Art
21.2 Concept
21.2.1 Basic Design Issues
21.2.2 Functionality of Key Components
21.3 Transfer of SFB Knowledge
21.4 Realization
21.4.1 Design and Simulation
21.4.2 Fabrication Processes
21.5 Combination of the Valve Layers
21.6 Pre-Evaluation of the Intermediates
21.7 Summary and Prototype
21.8 Outlook
Acknowledgements
References
Chapter 22 Microassembly Following the Desktop Factory Concept
Abstract
22.1 Introduction
22.1.1 Concepts for Miniaturization
22.1.2 Assumptions Concerning Desktop Factories
22.1.3 State of the Art for Desktop Factories
22.2 Miniaturized Components
22.2.1 Miniaturized Drive Components
22.2.2 Miniaturized Sensors
22.3 New Prototype of the Parvus Robot
22.3.1 New Design Concept
22.4 Experimental Verification
22.4.1 Challenges of Precision Assembly
22.4.2 Product to be Assembled
22.4.3 Process Chain of Example Assembly Process
22.4.4 The Assembly Setup
22.4.5 Experimental Results
22.5 Conclusion
Acknowledgements
References
Chapter 23 Automated Optical BGA-Inspection –AUTOBIN
Abstract
23.1 Introduction
23.2 Specification of the Target System
23.2.1 The Inspection System
23.2.2 Degrees of Freedom of the Handling Device
23.2.3 3D-Sensor and Projection System
23.2.4 Inspection Procedure
Acknowledgements
References
Chapter 24 Slider with Integrated Microactuator (SLIM) for Second Stage Actuation in Hard Disk Drives
Abstract
24.1 Introduction:
24.2 Concept
24.3 Micromagnetics Design and Fabrication
24.3.1 Micromagnetics Design
24.3.2 Micromagnetics Technology Basics
24.3.3 Micromagnetics Fabrication Steps
24.4 Micromechanics Design and Fabrication
24.4.1 Micromechanics
24.5 SLIM System Integration
24.5.1 Double Rowbar Stacking
24.5.2 Slider Air Bearing Surface
24.5.3 Chiplet Mounting and Slider Dicing
24.5.4 Head Assembly
24.6 Experimental Investigations
24.6.1 Component Level Tests
24.6.2 Device Level Tests
24.7 Conclusion and Outlook
Acknowledgements
References
Index