✦ LIBER ✦
Design and Fabrication of Si-Diaphragm, ZnO Piezoelectric Film-Based MEMS Acoustic Sensor Using SOI Wafers
✍ Scribed by Prasad, Mahanth; Sahula, Vineet; Khanna, Vinod Kumar
- Book ID
- 121789405
- Publisher
- IEEE
- Year
- 2013
- Tongue
- English
- Weight
- 868 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0894-6507
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