✦ LIBER ✦
Design and fabrication of an overhanging xy-microactuator with integrated tip for scanning surface profiling
✍ Scribed by P.-F. Indermuehle; C. Linder; J. Brugger; V.P. Jaecklin; N.F. de Rooij
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 993 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0924-4247
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