## Abstract The fabrication of a unidirectional microβvalve in silicon is reported. Pressure/flow characteristics between 0β1 bar for water were measured. Practically no leakage was observed (less than 1 nL min^β1^) when the valve was pressurized in the backward direction. A nonlinear pressureβflow
β¦ LIBER β¦
Design and fabrication of an electrochemically actuated microvalve
β Scribed by Dong Eun Lee; Steve Soper; Wanjun Wang
- Publisher
- Springer-Verlag
- Year
- 2008
- Tongue
- English
- Weight
- 417 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0946-7076
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